The reduced size of such devices does often not allow to connect them to conventional waveguide flanges. This paper reports for the first time on a micromachined interposer platform for characterizing highly miniaturized multi-port sub-THz waveguide components. IEEE Press, 2020 Keywordsbeam steering, leaky-wave antennas, silicon micromachining, terahertz radiation, quasi-optics, submillimeter-wave antennas, silicon on insulatorĮlectrical Engineering Identifiers urn:nbn:se:kth:diva-261201 (URN) 10.1109/TAP.2019.2943328 (DOI) 000511198600006 () 2-s2.0-85079266916 (Scopus ID)Ģ020 (English) In: Journal of Infrared, Millimeter and Terahertz Waves, ISSN 1866-6892, E-ISSN 1866-6906 Article in journal (Refereed) Published Abstract The design and fabrication challenges of such high performance antenna in the sub-THz frequency range are described and the measurement results of two fabricated prototypes are reported and discussed. The overall frequency beam steering frontend is extremely compact (24mm x 24mm x 0.9 mm) and can be directly mounted on a standard WM-864 waveguide flange. The micromachined low-loss PPW structure results in a measured average radiation efficiency of −1 dB and a maximum gain of 28.5 dBi with an input reflection coefficient below −10 dB.

The device is enabled by two extreme aspect ratio, 16 mm x16 mm large perforated membranes, which are only 30 μm thick, that provide the coupling between the two PPWs and form the LWA.

The pillbox, a two-level PPW structure, has an integrated parabolic reflector to generate a planar wave front. The design is based on a dielectric filled parallel-plate waveguide (PPW) leaky-wave antenna fed by a pillbox. The operation bandwidth of the antenna spans from 220 GHz to 300 GHz providing a simulated field of view of 56°. 672-682 Article in journal (Refereed) Published Abstract Ī very low-profile sub-THz high-gain frequencybeam steering antenna, enabled by silicon micromachining, is reported for the first time in this paper. 2020 (English) In: IEEE Transactions on Antennas and Propagation, ISSN 0018-926X, E-ISSN 1558-2221, Vol. The antennas are designed to be directly mounted onto a standard WM-570 waveguide flange.The design, fabrication, and measurements of eight prototypes are discussed in this paper and the performance of the antennas compared to the simulated data, as well as manufacturability and fabrication repeatability are reported in detail. The total height of the antennas is 1.1mm (1.2 at the center frequency), with sizes of 15mm x 18mm and 27mm x 30mm for both arrays. The low measured loss and large bandwidth are enabled by optimizing the designs to the process requirements of the SOI micromachining technology used in this work. The measured operation bandwidth for both antennas is 80 GHz (22% fractional bandwidth), and the total measured efficiency is above −2.5 dB and above −3.5 dB forthe two designs in the whole bandwidth. The two antennas show measured gains of 32.8 dBi and 38 dBi and consist of a 16x16 (256) element array and a 32x32 (1024) element array, respectively, which are fed by a corporate H-tree beamforming network.

Two high-gain flat array antenna designs operatingin the 320 – 400 GHz frequency range are reported in this paper. 4450-4458 Article in journal (Refereed) Published Abstract

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